Inkqubo yokuvelisa ipleyiti yensimbi engenasici

Etching iipleyiti zentsimbiyinkqubo yokuvelisa esetyenziswa ngokuqhelekileyo ukwenza iipatheni ezithile, iitekisi, okanye imifanekiso kumphezulu wentsimbi engenasici. Apha ngezantsi yinkqubo yemveliso yokukrola iipleyiti zentsimbi engenakutyiwa:

1. Ukulungiselela izinto eziphathekayo:Khetha ipleyiti yentsimbi efanelekileyo njengesixhobo sokuhombisa. Ngokuqhelekileyo, ubukhulu beplate yensimbi engenasici buvela kwi-0.5 millimeters ukuya kwi-3 millimeters, kuxhomekeke kwiimfuno zokudibanisa.

2. Yila ipateni:Zoba ipateni efunekayo, okubhaliweyo, okanye umfanekiso usebenzisa uYilo oluNcedayo kwiKhompyutha (CAD) ngokweemfuno zabathengi okanye iinkcukacha zoyilo.

3. Yenza itemplate yokubhala:Guqula ipateni eyiliweyo ibe yitemplate etching. I-Photolithography okanye ubuchule be-laser etching ingasetyenziselwa ukudlulisa iphethini kwipleyiti yensimbi engenasici. Ithemplate eveliswayo isebenza njenge-mask etching, ukukhusela iindawo zeplate yensimbi engenasici engafanele ifakwe.

4. Inkqubo yokufaka:Lungisa i-template etching phezu komphezulu wepleyiti yensimbi engenasici kwaye untywilisele ipleyiti yonke kwisisombululo se-etching. Isisombululo se-etching ngokuqhelekileyo sisisombululo esine-acidic ephazamisa umphezulu wensimbi engenasici, eyenza ipateni efunekayo. Ixesha lokuntywiliselwa kunye nobunzulu be-etching bugqitywe luyilo kunye neemfuno zenkqubo.

5. Ukucoca kunye nonyango:Emva kokucoca, susa ipleyiti yensimbi engenasici kwisisombululo se-etching kwaye uyicoce ngokucokisekileyo ukuze uphelise nayiphi na intsalela ye-etching kunye ne-etching template. Ukucocwa kwe-Acid kunye nonyango lwe-deoxidization lunokufuneka ukuze kugcinwe umgangatho ophezulu wensimbi engenasici.

6. Ukugqiba nokuhlola:Ipleyiti yensimbi engenasici iya kubonisa ipateni efunwayo, isicatshulwa, okanye umfanekiso emva kokucoca kunye nonyango. Yenza uhlolo lomgangatho ukuqinisekisa ukuba ipateni icacile kwaye umgangatho uyahlangabezana nemigangatho.

Ukuqukumbela

Kubalulekile ukuqaphela ukuba ukuqhotyoshelwa kweepleyiti zentsimbi engenakutyiwa kubandakanya ubugcisa obuchanekileyo kunye nokusetyenziswa kwezixhobo ezifanelekileyo kunye nezinto zekhemikhali. Ngexesha lenkqubo yokufaka, ukuthotyelwa okungqongqo kwiinkqubo zokhuseleko, ukunxiba izixhobo zokukhusela, kunye nokujonga izilumkiso zokhuseleko ziyimfuneko ukuze kuqinisekiswe ukhuseleko kunye nokusebenza kwenkqubo yokuvelisa.